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H2/N2 Mixing plasma pretreatment of Sapphire for GaN deposition
- 제목
- H2/N2 Mixing plasma pretreatment of Sapphire for GaN deposition
- 저자
- BYUN, Dong Jin
- 학회명
- International Symposium on the Physics of Semiconductors and Applications-2002( Abstracts of The 11th Seoul)
- 개최지
- Cheju, Korea
- 학회 개최일
- 2002-08-20 ~ 2002-08-23