H2/N2 Mixing plasma pretreatment of Sapphire for GaN deposition

제목
H2/N2 Mixing plasma pretreatment of Sapphire for GaN deposition
저자
BYUN, Dong Jin
학회명
International Symposium on the Physics of Semiconductors and Applications-2002( Abstracts of The 11th Seoul)
개최지
Cheju, Korea
학회 개최일
2002-08-20 ~ 2002-08-23