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Design and Fabrication of Low-Voltage Twisting-Type Thermal Actuators for Micromirrors
- 제목
- Design and Fabrication of Low-Voltage Twisting-Type Thermal Actuators for Micromirrors
- 저자
- KWON, Oh Myoung
- 발행일
- 2009-12-20
- 학회명
- ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference
- 개최지
- Renaissance Shanghai Zhongshan Park Hotel, Shanghai, China
- 개최국가
- 중국
- 학회 개최일
- 2009-12-18 ~ 2009-12-21