Performance analysis and Parametric Design of an Ultra Precision XY Parallel Kinematics Stage Using a Coupled Flexure Leaf Spring Mechanism

제목
Performance analysis and Parametric Design of an Ultra Precision XY Parallel Kinematics Stage Using a Coupled Flexure Leaf Spring Mechanism
저자
Jaehwa Jeong
학회명
The 9th International euspen Conference
개최국가
스페인
학회 개최일
2009-06-02 ~ 2009-06-05