Correlation between resin viscosity and imprinting pressure mode

초록

The changes in the period of the imprinting process were studied by changing resin viscosities and imprinting pressure mode. If an imprinting process is required to achieve a proposed level of residual resin thickness or window open, an appropriate process period should be assigned with respect to the magnitude and rate of the imprinting pressure because the residual layer thickness (RLT) is significantly influenced by these factors. Furthermore, the impact of resin viscosity on RLT variation is as significant as that of the imprinting pressure mode. We performed a numerical simulation using a mold having repetitive elliptical protrusions with a pattern density of 12.03% to determine the influence of the considered process factors on the imprinting process period.

키워드