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Electrical properties of MIM La2O3 capacitors deposited by ALD

  • Kim, Byong-Ho
제목
Electrical properties of MIM La2O3 capacitors deposited by ALD
저자
Kim, Byong-Ho
학회명
Proceedings of 22th International Korea-Japan Seminar on Ceramics
학회 개최일
2005-11-22 ~ 2005-11-25

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