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Effect of hydrogen atmosphere in Cu thin film by chemical vapor deposition using Cu(dmamb)2
Effect of hydrogen atmosphere in Cu thin film by chemical vapor deposition using Cu(dmamb)2
- 제목
- Effect of hydrogen atmosphere in Cu thin film by chemical vapor deposition using Cu(dmamb)2
- 제목 (타언어)
- Effect of hydrogen atmosphere in Cu thin film by chemical vapor deposition using Cu(dmamb)2
- 저자
- BYUN, Dong Jin
- 발행일
- 2010-06-29
- 학회명
- The 7th Asian Meeting on Ferroelectricity and the 7th Asian Meeting on ElectroCeramics
- 개최국가
- 대한민국
- 학회 개최일
- 2010-06-28 ~ 2010-07-01