Characteristics of ZnO Thin Films Grown by Atomic Layer Deposition Method with Temperature Variation

Characteristics of ZnO Thin Films Grown by Atomic Layer Deposition Method with Temperature Variation
제목
Characteristics of ZnO Thin Films Grown by Atomic Layer Deposition Method with Temperature Variation
제목 (타언어)
Characteristics of ZnO Thin Films Grown by Atomic Layer Deposition Method with Temperature Variation
저자
BYUN, Dong Jin
발행일
2007-01-30
학회명
ICDL 2007 Proceedings of The 1st International Conference on Display LEDs
개최국가
대한민국
학회 개최일
2007-01-30 ~ 2007-02-02