Fabrication and characterization of suspended silicon nanowire devices with intruded metal silicide contact

  • Hwang, Sung Woo
제목
Fabrication and characterization of suspended silicon nanowire devices with intruded metal silicide contact
저자
Hwang, Sung Woo
학회명
29th International Conference on the Physics of Semiconductors (ICPS2008)
개최국가
브라질
학회 개최일
2008-07-27 ~ 2008-08-01