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Effect of fluorine ions on wet etching behavior of copper/molybdenum in acidic solutions
- 제목
- Effect of fluorine ions on wet etching behavior of copper/molybdenum in acidic solutions
- 저자
- Hong MunPyo
- 발행일
- 2012-07-06
- 학회명
- ICMAP 2012 (The 4th International Conference on Microelectronics and Plasma Technology)
- 개최국가
- 대한민국
- 학회 개최일
- 2012-07-04 ~ 2012-07-06