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Status and new evaluation method of interfacial oxide between directly-bonded Si wafer pairs
- 제목
- Status and new evaluation method of interfacial oxide between directly-bonded Si wafer pairs
- 저자
- Ju, Byeongkwon
- 학회명
- IEEE MEMS’96
- 학회 개최일
- 1996-01-10 ~ 1996-01-10