Structural control of amorphous carbon films deposited by reactive particle beam assisted sputtering system

제목
Structural control of amorphous carbon films deposited by reactive particle beam assisted sputtering system
저자
Hong MunPyo
발행일
2010-07-07
학회명
10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma Science for Materials
개최지
Lotte Hotel Jeju, Korea
개최국가
대한민국
학회 개최일
2010-07-04 ~ 2010-07-08