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Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth
Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth
- 제목
- Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth
- 제목 (타언어)
- Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth
- 저자
- BYUN, Dong Jin
- 발행일
- 2021-05-13
- 학회명
- 2021년도 한국재료학회 춘계학술대회
- 개최국가
- 대한민국
- 학회 개최일
- 2021-05-13 ~ 2021-05-14