Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth

Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth
제목
Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth
제목 (타언어)
Study on the characteristics of AlN buffer layer deposited with RF-Magnetron sputter for GaN growth
저자
BYUN, Dong Jin
발행일
2021-05-13
학회명
2021년도 한국재료학회 춘계학술대회
개최국가
대한민국
학회 개최일
2021-05-13 ~ 2021-05-14