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Beyond the Current Horizontal of Silicon Thin Film Technology: Light-Soaking Free Nano-Crystal Embedded Polymorphous Silicon Thin Film and TFT by Neutral Beam Assisted CVD at Room Temperature
- 제목
- Beyond the Current Horizontal of Silicon Thin Film Technology: Light-Soaking Free Nano-Crystal Embedded Polymorphous Silicon Thin Film and TFT by Neutral Beam Assisted CVD at Room Temperature
- 저자
- Hong MunPyo
- 발행일
- 2012-10-09
- 학회명
- PRiME 2012
- 개최지
- 327,Level3, Hawaii Convention Center
- 개최국가
- 미국
- 학회 개최일
- 2012-10-07 ~ 2012-10-12