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Thermal annealing effect of ion-implanted sapphire substrate for GaN epilayer

제목
Thermal annealing effect of ion-implanted sapphire substrate for GaN epilayer
저자
BYUN, Dong Jin
학회명
제12회 한국반도체학술대회
개최지
COEX
학회 개최일
2005-02-24 ~ 2005-02-25

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