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Impact of Hydrogen Plasma on Electrical Properties and Deep Trap Spectra in Ga<sub>2</sub>O<sub>3</sub> Polymorphs
- Polyakov, Alexander Y.;
- Yakimov, Eugene B.;
- Nikolaev, Vladimir I.;
- Pechnikov, Alexei I.;
- Miakonkikh, Andrej V.;
- ... Lee, In-Hwan;
- 외 6명
WEB OF SCIENCE
18SCOPUS
18초록
In this study, the results of hydrogen plasma treatments of beta-Ga2O3, alpha-Ga2O3, kappa-Ga2O3 and gamma-Ga2O3 polymorphs are analyzed. For all polymorphs, the results strongly suggest an interplay between donor-like hydrogen configurations and acceptor complexes formed by hydrogen with gallium vacancies. A strong anisotropy of hydrogen plasma effects in the most thermodynamically stable beta-Ga2O3 are explained by its low-symmetry monoclinic crystal structure. For the metastable, alpha-, kappa- and gamma-polymorphs, it is shown that the net result of hydrogenation is often a strong increase in the density of centers supplying electrons in the near-surface regions. These centers are responsible for prominent, persistent photocapacitance and photocurrent effects.
키워드
- 제목
- Impact of Hydrogen Plasma on Electrical Properties and Deep Trap Spectra in Ga<sub>2</sub>O<sub>3</sub> Polymorphs
- 저자
- Polyakov, Alexander Y.; Yakimov, Eugene B.; Nikolaev, Vladimir I.; Pechnikov, Alexei I.; Miakonkikh, Andrej V.; Azarov, Alexander; Lee, In-Hwan; Vasilev, Anton A.; Kochkova, Anastasiia I.; Shchemerov, Ivan V.; Kuznetsov, Andrej; Pearton, Stephen J.
- 발행일
- 2023-09
- 유형
- Article
- 저널명
- Crystals
- 권
- 13
- 호
- 9