Impact of Hydrogen Plasma on Electrical Properties and Deep Trap Spectra in Ga<sub>2</sub>O<sub>3</sub> Polymorphs

  • Polyakov, Alexander Y.; 
  • Yakimov, Eugene B.; 
  • Nikolaev, Vladimir I.; 
  • Pechnikov, Alexei I.; 
  • Miakonkikh, Andrej V.; 
  • ... Lee, In-Hwan; 
  • 외 6명
Citations

WEB OF SCIENCE

18
Citations

SCOPUS

18

초록

In this study, the results of hydrogen plasma treatments of beta-Ga2O3, alpha-Ga2O3, kappa-Ga2O3 and gamma-Ga2O3 polymorphs are analyzed. For all polymorphs, the results strongly suggest an interplay between donor-like hydrogen configurations and acceptor complexes formed by hydrogen with gallium vacancies. A strong anisotropy of hydrogen plasma effects in the most thermodynamically stable beta-Ga2O3 are explained by its low-symmetry monoclinic crystal structure. For the metastable, alpha-, kappa- and gamma-polymorphs, it is shown that the net result of hydrogenation is often a strong increase in the density of centers supplying electrons in the near-surface regions. These centers are responsible for prominent, persistent photocapacitance and photocurrent effects.

키워드

Ga2O3; polymorphs; hydrogen; plasma; deep traps; THERMAL-STABILITY; ALPHA-GA2O3; EPSILON-GA2O3; DEUTERIUM; MOBILITY
제목
Impact of Hydrogen Plasma on Electrical Properties and Deep Trap Spectra in Ga<sub>2</sub>O<sub>3</sub> Polymorphs
저자
Polyakov, Alexander Y.; Yakimov, Eugene B.; Nikolaev, Vladimir I.; Pechnikov, Alexei I.; Miakonkikh, Andrej V.; Azarov, Alexander; Lee, In-Hwan; Vasilev, Anton A.; Kochkova, Anastasiia I.; Shchemerov, Ivan V.; Kuznetsov, Andrej; Pearton, Stephen J.
DOI
10.3390/cryst13091400
발행일
2023-09
유형
Article
저널명
Crystals
권
13
호
9