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CeO2 thin film deposition on SiO2 particles by MOCVD method for abrasive particles of CMP

  • Kwan Young Lee
제목
CeO2 thin film deposition on SiO2 particles by MOCVD method for abrasive particles of CMP
저자
Kwan Young Lee
학회명
한국화학공학회 2006년 추계 학술대회
학회 개최일
2006-10-27 ~ 2006-10-28

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