Effects of temperature on ZnO hybrids grown by metal-organic chemical vapor deposition

초록

The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure and temperature. Vertically aligned ZnO nanorods were grown on c-plane of sapphire substrate at 600 degrees C and 400 Torr. ZnO film was then formed in situ on the ZnO nanorods at 100, 600, and 700 degrees C and 10 Torr. High-resolution X-ray diffraction measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 3-5 mu m by field-emission scanning electron microscopy. The hybrid formed at 600 degrees C showed better crystalline quality those formed at 100 C or 700 degrees C. These structures have potential applicability as nanobuilding blocks in nanodevices. Published by Elsevier Ltd.

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