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Multiple Internal Reflection Fourier-Transform Infrared Spectroscopy and Its Application to ALD Mechanism Studies

  • Yunsoo Kim
제목
Multiple Internal Reflection Fourier-Transform Infrared Spectroscopy and Its Application to ALD Mechanism Studies
저자
Yunsoo Kim
학회명
제34회 한국진공학회 동계학술대회
개최지
용인 단국대학교 죽전캠퍼스
학회 개최일
2008-02-14 ~ 2008-02-15

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