comparison of the resistivity of aluminum doped zinc oxide thin films with various buffer layers fabricated using different deposition conditions of ald

제목
comparison of the resistivity of aluminum doped zinc oxide thin films with various buffer layers fabricated using different deposition conditions of ald
저자
BYUN, Dong Jin
학회명
proceeding of THe 2nd international conference on display and solid state lighting
개최지
seoul korea (coex)
학회 개최일
2008-01-30 ~ 2008-02-01