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Hydrogenated nanocrystalline silicon thin films deposited by rf-magnetron sputtering

  • Jonghun Lyou
제목
Hydrogenated nanocrystalline silicon thin films deposited by rf-magnetron sputtering
저자
Jonghun Lyou
학회명
The 12th Seoul International Symposium on the Physics of Semiconductors and Applications
개최지
한국
학회 개최일
2004-03-14 ~ 2004-03-16

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