ScholarWorks@고려대학교

상세 보기

Micromirror actuation with electrostatic force and plate bending

  • Pak, James Jungho
제목
Micromirror actuation with electrostatic force and plate bending
저자
Pak, James Jungho
학회명
SPIE's International Symposium on Photonics and Applications
개최국가
미국
학회 개최일
1999-11-01 ~ 1999-11-01

ScholarWorks@고려대학교

02841 서울특별시 성북구 안암로 145 Tel. 02-3290-2963

COPYRIGHT © 고려대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.