Properties of nonpolar Si-doped a-plane (11-20)GaN structures inserted SiNx interlayer with different deposition conditions

Properties of nonpolar Si-doped a-plane (11-20)GaN structures inserted SiNx interlayer with different deposition conditions
  • PARK, JUNG HO
제목
Properties of nonpolar Si-doped a-plane (11-20)GaN structures inserted SiNx interlayer with different deposition conditions
제목 (타언어)
Properties of nonpolar Si-doped a-plane (11-20)GaN structures inserted SiNx interlayer with different deposition conditions
저자
PARK, JUNG HO
발행일
2012-02-16
학회명
제 19회 한국반도체학술대회
개최국가
대한민국
학회 개최일
2012-02-15 ~ 2012-02-17