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Characteristic study of Si thin film deposition by Hyperthermal Neutral Beam
- 제목
- Characteristic study of Si thin film deposition by Hyperthermal Neutral Beam
- 저자
- Hong MunPyo
- 발행일
- 2010-07-08
- 학회명
- 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma Science for Materials
- 개최지
- Lotte Hotel Jeju, Korea
- 개최국가
- 대한민국
- 학회 개최일
- 2010-07-04 ~ 2010-07-08