Effect of sp2-Bonded Buffer Layer on cBN Growth by Unbalanced Magnetron Sputtering

  • CHOI, In-Hoon
제목
Effect of sp2-Bonded Buffer Layer on cBN Growth by Unbalanced Magnetron Sputtering
저자
CHOI, In-Hoon
학회명
Joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA
개최지
Joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA
학회 개최일
2002-01-01