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ALD of Some Oxides and Their Applications to Fabrication of Nonvolatile Memory Devices

  • Yunsoo Kim
제목
ALD of Some Oxides and Their Applications to Fabrication of Nonvolatile Memory Devices
저자
Yunsoo Kim
학회명
Baltic Conference on Atomic Layer Deposition 2006
개최지
University of Oslo, Oslo, Norway
학회 개최일
2006-06-19 ~ 2006-06-20

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