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Reliability of Cu/W-N thin films deposited on low dielectric const SiO:FILD

  • Kim Yong Tae
제목
Reliability of Cu/W-N thin films deposited on low dielectric const SiO:FILD
저자
Kim Yong Tae
발행일
1997-01-01
학회명
Fall meeting of MRS '97

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