Low-resistance and transparent Ni-Co solid solution/Au ohmic contacts to p-type GaN for green GaN-based light-emitting diodes

초록

We report on the formation of low-resistance and transparent p-type ohmic contact for green GaN-based light-emitting diodes (LEDs) using Ni-Co solid solution(5 nm)/Au(5 nm) scheme. The asdeposited Ni-Co solid solution(5 nm)/Au(5 nm) contact shows nonlinear current-voltage (I-V) characteristics. However, annealing the sample at 550 degrees C in air results in the formation of ohmic contacts with specific contact resistance of 6.5 x 10(-4) Omega cm(2). The annealed sample shows light transmittance of 71.7% at a wavelength of 530 nm, which is better than that (64.9%) of oxidized Ni/Au contacts. Based on Auger electron spectroscopy and x-ray photoemission spectroscopy results, the annealing-induced improvement of the contacts is described and discussed. (C) 2008 Elsevier Ltd. All rights reserved.

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