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Superhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering Method
Superhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering Method
- 제목
- Superhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering Method
- 제목 (타언어)
- Superhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering Method
- 저자
- Huh, Joo Youl
- 발행일
- 2016-09-26
- 학회명
- 4th International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites(ISASC 2016)
- 개최국가
- 대한민국
- 학회 개최일
- 2016-09-25 ~ 2016-09-28