A study on the effect of catalysts to SiC nanowire growth by APCVD using hexamethyldisilane

제목
A study on the effect of catalysts to SiC nanowire growth by APCVD using hexamethyldisilane
저자
BYUN, Dong Jin
학회명
Proceeding of KOCS International Symposium 2003
개최지
Seoul
학회 개최일
2003-07-05 ~ 2003-07-05