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FABRICATION OF SUB-MICRON SIZED SAPPHIRE PATTERNS BY USING NANOIMPRINT LITHOGRAPHY AND INDUCTIVELY-COUPLED PLASMA ETCHING
- 제목
- FABRICATION OF SUB-MICRON SIZED SAPPHIRE PATTERNS BY USING NANOIMPRINT LITHOGRAPHY AND INDUCTIVELY-COUPLED PLASMA ETCHING
- 저자
- Lee, Heon
- 학회명
- ICNS-8
- 개최국가
- 대한민국
- 학회 개최일
- 2009-10-18 ~ 2009-10-23