Influence of neutral particle beam energy on the structural properties of amorphous carbon films prepared by neutral particle beam assisted suttering

제목
Influence of neutral particle beam energy on the structural properties of amorphous carbon films prepared by neutral particle beam assisted suttering
저자
Hong MunPyo
학회명
제40회 한국진공학회 동계 정기 학술대회
개최국가
대한민국
학회 개최일
2011-02-09 ~ 2011-02-11