Characterization of non-stoichoimetric nickel-oxide thin films deposited by RF-magnetron sputtering

제목
Characterization of non-stoichoimetric nickel-oxide thin films deposited by RF-magnetron sputtering
저자
Ju, Byeongkwon
학회명
The 10th Asia Pacific Conference on Plasma Science and technology and the 23rd Symposium on Plasma Science for Materials
개최국가
대한민국
학회 개최일
2010-07-04 ~ 2010-07-08