Fabrication of nano-scale phase change materials using nano imprint lithograpy and reactive ion etching process

제목
Fabrication of nano-scale phase change materials using nano imprint lithograpy and reactive ion etching process
저자
Lee, Heon
학회명
2007 materialtodayasia
개최지
Beijing
학회 개최일
2007-09-02 ~ 2007-09-05