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Fabrication of nano-scale phase change materials using nano imprint lithograpy and reactive ion etching process
- 제목
- Fabrication of nano-scale phase change materials using nano imprint lithograpy and reactive ion etching process
- 저자
- Lee, Heon
- 학회명
- 2007 materialtodayasia
- 개최지
- Beijing
- 학회 개최일
- 2007-09-02 ~ 2007-09-05