Direct bonding between spacer and field emitter array using an electron-beam evaporated interlayer

제목
Direct bonding between spacer and field emitter array using an electron-beam evaporated interlayer
저자
Ju, Byeongkwon
학회명
SPIE’s 4th Annual Symposium on Smart Structures and Materials
학회 개최일
1997-03-10 ~ 1997-03-10