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Etching Mechanism of ZnO films using Inductively Coupled HBr/Ar Plasma

  • Kwon, Kwang-Ho
제목
Etching Mechanism of ZnO films using Inductively Coupled HBr/Ar Plasma
저자
Kwon, Kwang-Ho
학회명
30th International Symposium on Dry Process
개최국가
일본
학회 개최일
2008-11-26 ~ 2008-11-28

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