Electrical and optical characterization of GaN micro-wires

  • Jung, Younghun
  • Ahn, Jaehui
  • Mastro, Michael A.
  • Hite, Jennifer K.
  • Feigelson, Boris
  • 외 2명
Citations

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초록

A near atmospheric pressure solution growth process was developed to produce an abundant quantity of GaN micro-wires in the c-direction with a length of tens of microns and a diameter of approximately 1-10 mu m. Raman analysis showed that the micro-wires were free of stress which was expected for a free-forming crystal. The lack of stress and extended defects in the GaN micro-wire provided a useful test-bed to directly compare the wet-etch behavior of the polar c-planes and non-polar m-planes in GaN. The etch behavior at the end of the micro-wire (+/- c) was dramatically different, with the (0 0 0 1) plane found to be stable and the (0 0 0 -1) plane observed to rapidly etch into nanoscale hexagonal pyramids. Additionally a dielectrophoretic method was employed to readily align the wires as part of a larger device processing sequence. (C) 2011 Elsevier B.V. All rights reserved.

키워드

EtchingNanostructuesNitridesSemiconducting gallium compoundsGALLIUM NITRIDEPLANE GANSURFACEPOLAR
제목
Electrical and optical characterization of GaN micro-wires
저자
Jung, YounghunAhn, JaehuiMastro, Michael A.Hite, Jennifer K.Feigelson, BorisEddy, Charles R., Jr.Kim, Jihyun
DOI
10.1016/j.jcrysgro.2011.01.057
발행일
2011-07-01
유형
Article
저널명
Journal of Crystal Growth
326
1
페이지
81 ~ 84