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Micromachining and fabrication of thin films for MEMS-infrared detectors
- 제목
- Micromachining and fabrication of thin films for MEMS-infrared detectors
- 저자
- Ju, Byeongkwon
- 학회명
- 3rd Int’l Meeting of Pacific Rim Ceramic Societies
- 학회 개최일
- 1998-09-20 ~ 1998-09-23