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Nanocrystallization activated by direct/indirect thermal annealing in amorphous and nanocrystalline silicon thin films

  • Jonghun Lyou
제목
Nanocrystallization activated by direct/indirect thermal annealing in amorphous and nanocrystalline silicon thin films
저자
Jonghun Lyou
발행일
2010-08-23
학회명
IUMRS-ICEM 2010
개최지
Seoul, Korea
개최국가
대한민국
학회 개최일
2010-08-22 ~ 2010-08-27

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