상세 보기
A Study of the CMP(Chemical Mechanical Process) Simulation using FEM(Finite Element Method) and the Run-to-Run Control Algorithm
- 제목
- A Study of the CMP(Chemical Mechanical Process) Simulation using FEM(Finite Element Method) and the Run-to-Run Control Algorithm
- 저자
- Jun-Geol Baek
- 발행일
- 2009-11-09
- 학회명
- AEC/APC Symposium Asia 2009
- 개최지
- National Center of Sciences Building, Tokyo, Japan
- 개최국가
- 일본
- 학회 개최일
- 2009-11-09 ~ 2009-11-09