Effects of Composition Ratios and Microstructure on Mechanical and Electrical Properties of AZO –Zincone Nanolaminates Using Atomic and Molecular Layer Depositions

Effects of Composition Ratios and Microstructure on Mechanical and Electrical Properties of AZO –Zincone Nanolaminates Using Atomic and Molecular Layer Depositions
제목
Effects of Composition Ratios and Microstructure on Mechanical and Electrical Properties of AZO –Zincone Nanolaminates Using Atomic and Molecular Layer Depositions
제목 (타언어)
Effects of Composition Ratios and Microstructure on Mechanical and Electrical Properties of AZO –Zincone Nanolaminates Using Atomic and Molecular Layer Depositions
저자
Byoung-Ho Choi
발행일
2018-06-20
학회명
EVC-15 (15th European Vacuum Conference)
개최국가
스위스
학회 개최일
2018-06-17 ~ 2018-06-22