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Development of Low Temperature High Quality ITO Thin Film for Flexible Microelectronic Deivce based on Plastic substrate by Magnetic Field Shielded Sputtering Process
- 제목
- Development of Low Temperature High Quality ITO Thin Film for Flexible Microelectronic Deivce based on Plastic substrate by Magnetic Field Shielded Sputtering Process
- 저자
- Hong MunPyo
- 발행일
- 2010-10-14
- 학회명
- 10th International Meeting on Information Display
- 개최지
- KINTEX, SEOUL, KOREA
- 개최국가
- 대한민국
- 학회 개최일
- 2010-10-11 ~ 2010-10-15