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The effect of CeO2 abrasive size on dishing and step height reduction of silicon oxide film in STI-CMP

  • Lim, Dae-Soon
제목
The effect of CeO2 abrasive size on dishing and step height reduction of silicon oxide film in STI-CMP
저자
Lim, Dae-Soon
학회명
ICMCTF-2005
개최지
San Diego
학회 개최일
2005-05-02 ~ 2005-05-06

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