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Characteristics of Cu Thin Film on PET by ECR-PECVD

제목
Characteristics of Cu Thin Film on PET by ECR-PECVD
저자
BYUN, Dong Jin
학회명
Abstracts of 2003 IEEE International Conference on Plasma Science
개최지
Cheju, Korea
학회 개최일
2003-06-02 ~ 2003-06-05

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