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Etching Mechanism of ZnO films using Inductively Coupled HBr/Ar Plasma

  • Min Nam Ki
제목
Etching Mechanism of ZnO films using Inductively Coupled HBr/Ar Plasma
저자
Min Nam Ki
학회명
1st International Conference on Microelectronics and plasma Technology
개최국가
대한민국
학회 개최일
2008-08-18 ~ 2008-08-20

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