Reconfiguration of operation modes in silicon nanowire field-effect transistors by electrostatic virtual doping

  • Kim, Taekham
  • Lim, Doohyeok
  • Son, Jaemin
  • Cho, Kyoungah
  • Kim, Sangsig
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초록

In this study, we perform reconfigurable n- and p-channel operations of a tri-top-gate field-effect transistor (FET) made of a p(+)-i-n(+) silicon nanowire (SiNW). In the reconfigurable FET (RFET), two polarity gates and one control gate induce virtual electrostatic doping in the SiNW channel. The polarity gates are electrically connected to each other and program the channel type, while the control gate modulates the flow of charge carriers in the SiNW channel. The SiNW RFET features simple device design, symmetrical electrical characteristics in the n- and p-channel operation modes using p(+)-i-n(+) diode characteristics, and both operation modes exhibit high ON/OFF ratios (similar to 10(6)) and high ON currents (similar to 1 mu A mu m(-1)). The proposed device is demonstrated experimentally using a fully CMOS-compatible top-down processes.

키워드

reconfigurable field-effect transistorselectrostatic dopingsilicon nanowirespolarity control
제목
Reconfiguration of operation modes in silicon nanowire field-effect transistors by electrostatic virtual doping
저자
Kim, TaekhamLim, DoohyeokSon, JaeminCho, KyoungahKim, Sangsig
DOI
10.1088/1361-6528/ac7dae
발행일
2022-10-08
유형
Article
저널명
Nanotechnology
33
41