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Design, Fabrication and Characterization of Front-side Dry-Etched Microbridge Structure Thermopile with 3-5 ㎛Infrared Absorber

  • Kwon, Kwang-Ho
제목
Design, Fabrication and Characterization of Front-side Dry-Etched Microbridge Structure Thermopile with 3-5 ㎛Infrared Absorber
저자
Kwon, Kwang-Ho
학회명
30th International Symposium on Dry Process
개최국가
일본
학회 개최일
2008-11-26 ~ 2008-11-28

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