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Heteroepitaxial Growth of -SiC Using Plasma Activated Methane and Silane Sources

  • CHOI, In-Hoon
제목
Heteroepitaxial Growth of -SiC Using Plasma Activated Methane and Silane Sources
저자
CHOI, In-Hoon
학회명
The lst Asian-European International Conference on Plasma Surface Engineering conference
개최지
서울
학회 개최일
1997-10-05 ~ 1997-10-09

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