Fabrication process and properties of PZT thick film cantilevers for bio-sensing applications

  • Taeyun Kwon
제목
Fabrication process and properties of PZT thick film cantilevers for bio-sensing applications
저자
Taeyun Kwon
학회명
Proceedings of International Sensors Conference 2005
개최지
Daejeon, Korea
개최국가
대한민국
학회 개최일
2005-11-11 ~ 2005-11-12