Fabrication and its response characteristics of MELO accelerometer

  • Pak, James Jungho
제목
Fabrication and its response characteristics of MELO accelerometer
저자
Pak, James Jungho
학회명
IEEE Region 10 International Conference on Microelectronics and VLSI
개최국가
미국
학회 개최일
1995-01-01 ~ 1995-01-01