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TiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modeling
TiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modeling
- 제목
- TiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modeling
- 제목 (타언어)
- TiO2 thin film in an inductively coupled Ar/Cl2/HBr plasma using neural network modeling
- 저자
- PARK KANG-BAK
- 발행일
- 2013-08-28
- 학회명
- AEPSE 2013
- 개최지
- Korea(Jeju)
- 개최국가
- 대한민국
- 학회 개최일
- 2013-08-25 ~ 2013-08-30